Blue and Green Light Emission from a-C ∶ H Film Prepared by Organic Source 有机源制备的氢化非晶碳膜的新颖发光行为
Fluorinated diamond-like carbon ( a-C: F) films with different fluorine content were grown on silicon ( 100) substrate by pulse filtered cathodic vacuum arc source technology ( FCVA). 采用脉冲磁过滤阴极真空弧源沉积系统(FCVA)在单晶硅基片上制备了含氟量不同的一系列氟化类金刚石膜(a-C:F)。